Doping top-down e-beam fabricated germanium nanowires using molecular monolayers

Autor: Long, B., Alessio Verni, G., O’Connell, J., Shayesteh, M., Gangnaik, A., Georgiev, Y.M., Carolan, P., O’Connell, D., Kuhn, K.J., Clendenning, S.B., Nagle, R., Duffy, R., Holmes, J.D.
Zdroj: In Materials Science in Semiconductor Processing May 2017 62:196-200
Databáze: ScienceDirect