Doping top-down e-beam fabricated germanium nanowires using molecular monolayers
Autor: | Long, B., Alessio Verni, G., O’Connell, J., Shayesteh, M., Gangnaik, A., Georgiev, Y.M., Carolan, P., O’Connell, D., Kuhn, K.J., Clendenning, S.B., Nagle, R., Duffy, R., Holmes, J.D. |
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Zdroj: | In Materials Science in Semiconductor Processing May 2017 62:196-200 |
Databáze: | ScienceDirect |
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