Simultaneous diffusion of Si and Ge in isotopically controlled [formula omitted] heterostructures

Autor: Kube, R., Bracht, H., Lundsgaard Hansen, J., Nylandsted Larsen, A., Haller, E.E., Paul, S., Lerch, W.
Zdroj: In Materials Science in Semiconductor Processing 2008 11(5):378-383
Databáze: ScienceDirect