Simultaneous diffusion of Si and Ge in isotopically controlled [formula omitted] heterostructures
Autor: | Kube, R., Bracht, H., Lundsgaard Hansen, J., Nylandsted Larsen, A., Haller, E.E., Paul, S., Lerch, W. |
---|---|
Zdroj: | In Materials Science in Semiconductor Processing 2008 11(5):378-383 |
Databáze: | ScienceDirect |
Externí odkaz: |