Monte carlo study of mobility in Si devices with [formula omitted]-based oxides

Autor: Ferrari, Giulio, Watling, J.R., Roy, S., Barker, J.R., Zeitzoff, P., Bersuker, G., Asenov, A.
Zdroj: In Materials Science in Semiconductor Processing 2006 9(6):995-999
Databáze: ScienceDirect