Non-contact charge-voltage method for dielectric characterization on small test areas of IC product wafers

Autor: Edelman, Piotr, Marinskiy, Dmitriy, Almeida, Carlos, Kochey, Joseph N., Byelyayev, Anton, Wilson, Marshall, Savtchouk, Alexandre, D’Amico, John, Findlay, Andrew, Jastrzebski, Lubek, Lagowski, Jacek
Zdroj: In Materials Science in Semiconductor Processing 2006 9(1):252-256
Databáze: ScienceDirect
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