From overall equipment efficiency (OEE) to overall Fab effectiveness (OFE)
| Autor: | Oechsner, Richard *, Pfeffer, Markus, Pfitzner, Lothar, Binder, Harald, Müller, Eckhard, Vonderstrass, Thomas |
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| Zdroj: | In Materials Science in Semiconductor Processing 2002 5(4):333-339 |
| Databáze: | ScienceDirect |
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