Integration of piezoelectric and electrothermal actuators for high-resolution Atomic Force Microscopy
| Autor: | Nasrabadi, Hazhir Mahmoodi, Nikooienejad, Nastaran, Vikrant, K.S., Moheimani, S.O. Reza |
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| Zdroj: | In Mechatronics May 2024 99 |
| Databáze: | ScienceDirect |
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Full Text from ScienceDirect