Effect of pulse interval on deposition of diamond-like carbon through high-power impulse magnetron sputtering
| Autor: | Ohta, Takayuki, Kunieda, Hiro, Harigai, Toru, Oda, Akinori, Kousaka, Hiroyuki |
|---|---|
| Zdroj: | In Diamond & Related Materials October 2024 148 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect