Structural transformation of C+ implanted diamond and lift-off process

Autor: Zhu, Xiaohua, Chan, Siyi, Yuan, Xiaolu, Tu, Juping, Shao, Siwu, Jia, Yuwei, Chen, Liangxian, Wei, Junjun, Liu, Jinlong, Kawarada, Hiroshi, Li, Chengming
Zdroj: In Diamond & Related Materials December 2022 130
Databáze: ScienceDirect