Annealing effect of surface-activated bonded diamond/Si interface

Autor: Liang, Jianbo, Zhou, Yan, Masuya, Satoshi, Gucmann, Filip, Singh, Manikant, Pomeroy, James, Kim, Seongwoo, Kuball, Martin, Kasu, Makoto, Shigekawa, Naoteru
Zdroj: In Diamond & Related Materials March 2019 93:187-192
Databáze: ScienceDirect