Synthesis of electrical conductive diamond on BeCu alloy for electrical contact of test process in semiconductor fabrication

Autor:	Amano, H., Tsubota, T., Murakami, N., Ohno, T., Sawada, S., Suenaga, T., Nagahata, H.
Zdroj:	In Diamond & Related Materials April 2012 24:195-200
Databáze:	ScienceDirect
Externí odkaz:	Zobrazit plný text záznamu Full Text from ScienceDirect