Effect of bias and hydrogenation on the elemental concentration and the thermal stability of amorphous thin carbon films, deposited on Si substrate
| Autor: | Kayani, A., Moore, A., Nandasiri, M.I., AlFaify, S., Garratt, E., Ingram, D., Maqbool, M. |
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| Zdroj: | In Diamond & Related Materials 2009 18(11):1333-1337 |
| Databáze: | ScienceDirect |
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