Post-deposition annealing of thin RF magnetron sputter-deposited VO2 films above the melting point
| Autor: | Maklakov, Sergey S., Polozov, Victor I., Maklakov, Sergey A., Mishin, Alexey D., Ryzhikov, Ilya A., Trigub, Alexander L., Amelichev, Vadim A., Maslakov, Konstantin I., Kisel, Vladimir N. |
|---|---|
| Zdroj: | In Journal of Alloys and Compounds 30 September 2018 763:558-569 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect