Optimization of the performances of SU-8 organic microcantilever resonators by tuning the viscoelastic properties of the polymer
| Autor: | Dubourg, G., Dufour, I., Pellet, C., Ayela, C. |
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| Zdroj: | In Sensors & Actuators: B. Chemical 5 July 2012 169:320-326 |
| Databáze: | ScienceDirect |
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