Plasma-enhanced atomic-layer-deposited HfO2–SiO2 nanolaminates for broadband antireflection coatings
| Autor: | Zhang, Xuechen, Zeng, Tingting, Song, Chen, Shao, Jianda, Zhu, Meiping |
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| Zdroj: | In Optical Materials April 2024 150 |
| Databáze: | ScienceDirect |
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