Integrated silica micro-opto-electromechanical steering device for laser beam scanning
| Autor: | Petroz, Karine a, *, Ollier, Eric a, Grateau, Henri b, Mottier, Patrick a |
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| Zdroj: | In Sensors & Actuators: A. Physical 1999 73(1):117-121 |
| Databáze: | ScienceDirect |
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