Ultra-sensitive tactile force/proximity sensor based on monolithically integrated microcantilever
| Autor: | Lin, Cong, Liu, Yi, Zhu, Xincheng, Wang, Xueliang, Miao, Jiahao, Zhou, Zhanxuan, Yu, Xiaomei |
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| Zdroj: | In Sensors and Actuators: A. Physical 16 October 2024 377 |
| Databáze: | ScienceDirect |
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