Effect of thermally grown Al2O3 on electrical insulation properties of thin film sensors for high temperature environments
| Autor: | Liu, Hao, Mao, Xiling, Jiang, Shuwen |
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| Zdroj: | In Sensors and Actuators: A. Physical 1 November 2021 331 |
| Databáze: | ScienceDirect |
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