Design and realization of sculpture-shaped ciliary MEMS vector hydrophone

Autor:	Chen, Peng, Zhang, Guojun, Yang, Xi, Ji, SongXiang, Liang, XiaoQi, Lv, Ting, Zhang, XiaoYong, Zhu, Shan, Shang, ZhenZhen, Zhang, WenDong
Zdroj:	In Sensors and Actuators: A. Physical 1 November 2021 331
Databáze:	ScienceDirect
Externí odkaz:	Zobrazit plný text záznamu Full Text from ScienceDirect