MEMS cantilever sensor array oscillators: Theory and experiments
| Autor: | Lulec, Sevil Zeynep, Adiyan, Ulas, Yaralioglu, Goksen G., Leblebici, Yusuf, Urey, Hakan |
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| Zdroj: | In Sensors & Actuators: A. Physical 1 January 2016 237:147-154 |
| Databáze: | ScienceDirect |
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