Free-standing subwavelength grid infrared cut filter of 90 mm diameter for LPP EUV light source
| Autor: | Suzuki, Yukio, Totsu, Kentaro, Moriyama, Masaaki, Esashi, Masayoshi, Tanaka, Shuji |
|---|---|
| Zdroj: | In Sensors & Actuators: A. Physical 15 July 2015 231:59-64 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect