Advantages of PZT thick film for MEMS sensors
| Autor: | Hindrichsen, C.G., Lou-Møller, R., Hansen, K., Thomsen, E.V. |
|---|---|
| Zdroj: | In Sensors & Actuators: A. Physical 2010 163(1):9-14 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Hindrichsen, C.G., Lou-Møller, R., Hansen, K., Thomsen, E.V. |
|---|---|
| Zdroj: | In Sensors & Actuators: A. Physical 2010 163(1):9-14 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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Full Text from ScienceDirect