Fabrication and characterization of a shear mode AlN solidly mounted resonator-silicone microfluidic system for in-liquid sensor applications
| Autor: | Sharma, Gunjana, Liljeholm, Lina, Enlund, Johannes, Bjurström, Johan, Katardjiev, Ilia, Hjort, Klas |
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| Zdroj: | In Sensors & Actuators: A. Physical 2010 159(1):111-116 |
| Databáze: | ScienceDirect |
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