Waveform design for pulse-and-hold electrostatic actuation in MEMS
| Autor: | Sumali, Hartono, Massad, Jordan E., Czaplewski, David A., Dyck, Christopher W. |
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| Zdroj: | In Sensors & Actuators: A. Physical 2007 134(1):213-220 |
| Databáze: | ScienceDirect |
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