Coupled-resonator micromechanical filters with voltage tuneable bandpass characteristic in thick-film polysilicon technology
| Autor: | Galayko, Dimitri, Kaiser, Andreas, Legrand, Bernard, Buchaillot, Lionel, Combi, Chantal, Collard, Dominique |
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| Zdroj: | In Sensors & Actuators: A. Physical 2006 126(1):227-240 |
| Databáze: | ScienceDirect |
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