Direct drawing method for microfabrication based on selective metal plating technology

Autor: Konishi, Satoshi, Honsho, Kazuhiro, Yanada, Masashi, Minami, Isao, Kimura, Yukie, Ikeda, Shinji
Zdroj: In Sensors & Actuators: A. Physical 2003 103(1):135-142
Databáze: ScienceDirect