Silicon membranes fabrication by wet anisotropic etching
| Autor: | Iosub, Rodica, Moldovan, Carmen, Modreanu, M. |
|---|---|
| Zdroj: | In Sensors & Actuators: A. Physical 2002 99(1):104-111 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Iosub, Rodica, Moldovan, Carmen, Modreanu, M. |
|---|---|
| Zdroj: | In Sensors & Actuators: A. Physical 2002 99(1):104-111 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect