Comparison of porous silicon, porous polysilicon and porous silicon carbide as materials for humidity sensing applications
| Autor: | Connolly, E.J., O’Halloran, G.M., Pham, H.T.M., Sarro, P.M., French, P.J. |
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| Zdroj: | In Sensors & Actuators: A. Physical 30 April 2002 99(1-2):25-30 |
| Databáze: | ScienceDirect |
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