Improving yield, accuracy and complexity in surface tension self-assembled MOEMS

Autor:	Syms, R.R.A. *, Gormley, C., Blackstone, S.
Zdroj:	In Sensors & Actuators: A. Physical 2001 88(3):273-283
Databáze:	ScienceDirect
Externí odkaz:	Zobrazit plný text záznamu Full Text from ScienceDirect