Long-time constant-capacitance DLTS investigations of 6H SiC/MOS structures: comparison of dry and wet oxidation
| Autor: | Bassler, M. *, Pensl, G. |
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| Zdroj: | In Materials Science & Engineering B 1999 61:490-492 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Bassler, M. *, Pensl, G. |
|---|---|
| Zdroj: | In Materials Science & Engineering B 1999 61:490-492 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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