Gettering in silicon-on-insulator wafers with polysilicon layer
| Autor: | Savin, H., Yli-Koski, M., Haarahiltunen, A., Virkkala, V., Talvitie, H., Asghar, M.I., Sinkkonen, J., Hintsala, J. |
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| Zdroj: | In Materials Science & Engineering B 2009 159:259-263 |
| Databáze: | ScienceDirect |
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