Thermal stability of nickel silicide on silicon on insulator (SOI) material
| Autor: | Cafra, B., Alberti, A. *, Ottaviano, L., Bongiorno, C., Mannino, G., Kammler, T., Feudel, T. |
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| Zdroj: | In Materials Science & Engineering B 2004 114:228-231 |
| Databáze: | ScienceDirect |
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