Stress-induced changes of thermal donor formation in heat-treated Czochralski-grown silicon
Autor: | Emtsev, V.V. *, Andreev, B.A., Davydov, V.Yu., Poloskin, D.S., Oganesyan, G.A., Kryzhkov, D.I., Shmagin, V.B., Emtsev, V.V., Jr, Misiuk, A., Londos, C.A. |
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Zdroj: | In Physica B: Physics of Condensed Matter 31 December 2003 340-342:769-772 |
Databáze: | ScienceDirect |
Externí odkaz: |