Vapor phase treatment–total reflection X-ray fluorescence for trace elemental analysis of silicon wafer surface
| Autor: | Takahara, Hikari, Mori, Yoshihiro, Shibata, Harumi, Shimazaki, Ayako, Shabani, Mohammad B., Yamagami, Motoyuki, Yabumoto, Norikuni, Nishihagi, Kazuo, Gohshi, Yohichi |
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| Zdroj: | In Spectrochimica Acta Part B: Atomic Spectroscopy 1 December 2013 90:72-82 |
| Databáze: | ScienceDirect |
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