Chemical surface analysis on materials and devices under functional conditions – Environmental photoelectron spectroscopy as non-destructive tool for routine characterization

Autor: Dietrich, Paul M., Bahr, Stephan, Yamamoto, Takashi, Meyer, Michael, Thissen, Andreas
Zdroj: In Journal of Electron Spectroscopy and Related Phenomena February 2019 231:118-126
Databáze: ScienceDirect