Effect of YF3 on fluorocarbon plasma resistance of Y2O3–Al2O3–B2O3 glasses
| Autor: | Kim, Yeonju, Kim, Jisu, Kim, Ungsoo, Kim, Kangduk |
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| Zdroj: | In Ceramics International 15 September 2024 50(18) Part A:32225-32232 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Kim, Yeonju, Kim, Jisu, Kim, Ungsoo, Kim, Kangduk |
|---|---|
| Zdroj: | In Ceramics International 15 September 2024 50(18) Part A:32225-32232 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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Full Text from ScienceDirect