Effect of thickness scaling on the switching dynamics of ferroelectric HfO2–ZrO2 capacitors
| Autor: | Peng, Yue, Wang, Zhe, Xiao, Wenwu, Ma, Yu, Liu, Fenning, Deng, Xinran, Yu, Xiao, Liu, Yan, Han, Genquan, Hao, Yue |
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| Zdroj: | In Ceramics International 1 October 2022 48(19) Part A:28489-28495 |
| Databáze: | ScienceDirect |
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