Plasma Enhanced atomic layer deposited amorphous gallium oxide thin films using novel trimethyl[N-(2-methoxyethyl)-2-methylpropan-2-amine]gallium
| Autor: | Hong, TaeHyun, Choi, Wan-Ho, Choi, Su-Hwan, Lee, HyunKyung, Seok, Jang Hyeon, Park, Jung Woo, Lim, Jun Hyung, Park, Jin-Seong |
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| Zdroj: | In Ceramics International 15 January 2021 47(2):1588-1593 |
| Databáze: | ScienceDirect |
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