Triethylamine borane thermal decomposition for BN low pressure chemical vapour deposition
| Autor: | Fenetaud, Pierre, Roger, Jérôme, Chollon, Georges, Jacques, Sylvain |
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| Zdroj: | In Surface & Coatings Technology 15 November 2023 472 |
| Databáze: | ScienceDirect |
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Full Text from ScienceDirect