Impact of ion energies in Ar/H2 capacitively coupled radio frequency discharges on PEALD processes of titanium films
| Autor: | Iwashita, Shinya, Denpoh, Kazuki, Kikuchi, Takamichi, Suzuki, Yusuke, Wagatsuma, Yuichiro, Hasegawa, Toshio, Moriya, Tsuyoshi |
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| Zdroj: | In Surface & Coatings Technology 25 September 2018 350:740-744 |
| Databáze: | ScienceDirect |
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