Effect of scandium content on structure and piezoelectric properties of AlScN films deposited by reactive pulse magnetron sputtering
| Autor: | Zywitzki, Olaf, Modes, Thomas, Barth, Stephan, Bartzsch, Hagen, Frach, Peter |
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| Zdroj: | In Surface & Coatings Technology 15 January 2017 309:417-422 |
| Databáze: | ScienceDirect |
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