Mechanisms for compositional variations of coatings sputtered from a WS2 target

Autor: Särhammar, E., Strandberg, E., Sundberg, J., Nyberg, H., Kubart, T., Jacobson, S., Jansson, U., Nyberg, T.
Zdroj: In Surface & Coatings Technology 15 August 2014 252:186-190
Databáze: ScienceDirect