Mechanisms for compositional variations of coatings sputtered from a WS2 target
Autor: | Särhammar, E., Strandberg, E., Sundberg, J., Nyberg, H., Kubart, T., Jacobson, S., Jansson, U., Nyberg, T. |
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Zdroj: | In Surface & Coatings Technology 15 August 2014 252:186-190 |
Databáze: | ScienceDirect |
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