Vacuum arc filtered metal plasma application in hybrid technologies of ion-beam and plasma material processing
| Autor: | Stepanov, I.B., Ryabchikov, A.I., Nochovnaya, N.A., Sharkeev, Y.P., Shulepov, I.A., Ryabchikov, I.A., Sivin, D.O., Fortuna, S.V. |
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| Zdroj: | In Surface & Coatings Technology 2007 201(19):8596-8600 |
| Databáze: | ScienceDirect |
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