Structural and optical characterization of fluorinated hydrogenated silicon carbide films deposited by pulsed glow discharge
| Autor: | Jacobsohn, L.G., Franceschini, D.F., Afanasyev-Charkin, I.V., Cooke, D.W., Daemen, L.L., Averitt, R.D., Nastasi, M. |
|---|---|
| Zdroj: | In Surface & Coatings Technology 2006 200(20):6079-6082 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect