Growth of AlN films on Si (100) and Si (111) substrates by reactive magnetron sputtering
| Autor: | Zhang, J.X. *, Cheng, H., Chen, Y.Z., Uddin, A., Yuan, Shu, Geng, S.J., Zhang, S. |
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| Zdroj: | In Surface & Coatings Technology 2005 198(1):68-73 |
| Databáze: | ScienceDirect |
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