Investigation of RF and DC plasma jet system during deposition of highly oriented ZnO thin films
| Autor: | Čada, M., Hubička, Z. *, Adámek, P., Ptáček, P., Šı́chová, H., Šı́cha, M., Jastrabı́k, L. |
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| Zdroj: | In Surface & Coatings Technology 2003 174:627-631 |
| Databáze: | ScienceDirect |
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