Epitaxial cobalt silicide formation using a Co/TiSix bilayer on Si (1 0 0) by sputtering
| Autor: | Jeong, Jin Jung, Lim, Jongmin, Lee, Chongmu * |
|---|---|
| Zdroj: | In Surface & Coatings Technology 1 July 2003 171(1-3):6-10 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
| Autor: | Jeong, Jin Jung, Lim, Jongmin, Lee, Chongmu * |
|---|---|
| Zdroj: | In Surface & Coatings Technology 1 July 2003 171(1-3):6-10 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect