Low-pressure RF multi-plasma-jet system for deposition of alloy and composite thin films
| Autor: | Šı́cha, M, Hubicka, Z *, Soukup, L, Jastrabı́k, L, Cada, M, Špatenka, P |
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| Zdroj: | In Surface & Coatings Technology 2001 148(2):199-205 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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Full Text from ScienceDirect