A comparative study of microstructure and mechanical properties for CrN x films with various deposition rates by magnetron sputtering
| Autor: | Nam, Kyung H. *, Jung, Yun M., Han, Jeon G. |
|---|---|
| Zdroj: | In Surface & Coatings Technology 2001 142:1012-1016 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect