Does N[formula omitted] gas behave as a surfactant during Ag thin-film sputtering deposition? Insights from in vacuo and real-time measurements

Autor: Zapata, Ramiro, Balestrieri, Matteo, Gozhyk, Iryna, Montigaud, Hervé, Lazzari, Rémi
Zdroj: In Applied Surface Science 1 May 2024 654
Databáze: ScienceDirect